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Journal of Structural Chemistry

, Volume 59, Issue 7, pp 1588–1595 | Cite as

Physicochemical Properties and Structure of SiCxNy:Fe Films Grown From a Gas Mixture of Ferrocene, Hydrogen and 1,1,3,3,5,5-Hexamethylcyclotrisilazane

  • N. I. FainerEmail author
  • R. V. Pushkarev
  • S. B. Ehrenburg
  • S. V. Trubina
  • V. A. Shestakov
  • I. S. Merenkov
  • M. Terauchi
Article
  • 11 Downloads

Abstract

Raman spectroscopy, high-resolution transmission electron microscopy (HRTEM), and EXAFS spectroscopy are used to study the composition and structure of SiCxNy:Fe films obtained by chemical vapor deposition (CVD) in the Fe–Si–C–N–H system from a mixture of hydrogen, ferrocene (C5H5)2Fe, and organosilicon compound 1,1,3,3,5,5–hexamethylcyclotrisilazane (HMCTS) C6H21N3Si3. The films are deposited under low pressures (LPCVD) at 1123–1273 K, and their phase composition at 300–1300 K is predicted using thermodynamic modeling. The obtained films are nanocomposites with amorphous matrices containing α-Fe crystallites and carbon clusters with a size of 5–10 nm.

Keywords

nanocomposite films thermodynamic modeling CVD 1,1,3,3,5,5-hexamethylcyclotrisilazane ferrocene Raman HRTEM and EXAFS spectroscopy 

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Copyright information

© Pleiades Publishing, Ltd. 2018

Authors and Affiliations

  • N. I. Fainer
    • 1
    Email author
  • R. V. Pushkarev
    • 1
  • S. B. Ehrenburg
    • 1
  • S. V. Trubina
    • 1
  • V. A. Shestakov
    • 1
  • I. S. Merenkov
    • 1
  • M. Terauchi
    • 2
  1. 1.Nikolaev Institute of Inorganic Chemistry, Siberian BranchRussian Academy of SciencesNovosibirskRussia
  2. 2.IMRAMTohoku UniversitySendaiJapan

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