JETP Letters

, Volume 99, Issue 9, pp 531–534 | Cite as

Fabrication of submicron structures by three-dimensional laser lithography

  • I. I. Shishkin
  • M. V. Rybin
  • K. B. Samusev
  • M. F. Limonov
  • R. V. Kiyan
  • B. N. Chichkov
  • Yu. S. Kivshar’
  • P. A. Belov
Condensed Matter

Abstract

As a demonstration of unique capabilities of three-dimensional laser lithography, an example complex-shape microobject and photonic crystals with “woodpile” structure for the infrared spectral range are fabricated by this technique. Photonic dispersion relations for the woodpile structure are calculated for different values of the permittivity contrast and the filling factor.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    S. Kawata, H.-B. Sun, T. Tanaka, and K. Takada, Nature 412, 697 (2001).ADSCrossRefGoogle Scholar
  2. 2.
    A. Ovsianikov, J. Viertl, B. Chichkov, M. Oubaha, B. MacCraith, I. Sakellari, A. Giakoumaki, D. Gray, M. Vamvakaki, M. Farsari, and C. Fotakis, ACS Nano 2, 2257 (2008).CrossRefGoogle Scholar
  3. 3.
    M. Farsari and B. N. Chichkov, Nature Photon. 3, 450 (2009).ADSCrossRefGoogle Scholar
  4. 4.
    J. H. Strickler and W. W. Webb, in Proceedings of the CAN-AM Workshop of International Society for Optics and Photonics, Rochester, New York, October 9–10, 1991 (1991), p. 107.Google Scholar
  5. 5.
    D. A. Parthenopoulos and P. M. Rentzepis, Science 245, 843 (1989).ADSCrossRefGoogle Scholar
  6. 6.
    M. Göppert-Mayer, Ann. Phys. 401, 273 (1931).CrossRefGoogle Scholar
  7. 7.
    S. Maruo, O. Nakamura, and S. Kawata, Opt. Lett. 22, 132 (1997).ADSCrossRefGoogle Scholar
  8. 8.
    S. H. Park, S. H. Lee, D.-Y. Yang, H. J. Kong, and K.-S. Lee, Appl. Phys. Lett. 87, 154108 (2005).ADSCrossRefGoogle Scholar
  9. 9.
    J. D. Joannopoulos, S. G. Johnson, J. N. Winn, and R. D. Meade, Photonic Crystals: Molding the Flow of Light, 2nd ed. (Princeton Univ. Press, Princeton, 2008), p. 304.Google Scholar
  10. 10.
    Optical Properties of Photonic Structures: Interplay of Order and Disorder, Ed. by M. F. Limonov and R. M. De La Rue (CRC Press, Taylor and Francis Group, Boca Raton, 2012), p. 566.Google Scholar
  11. 11.
    I. I. Shishkin, K. B. Samusev, M. V. Rybin, M. F. Limonov, Yu. S. Kivshar’, A. Gaidukeviciute, R. V. Kiyan, and B. N. Chichkov, JETP Lett. 95, 457 (2012).ADSCrossRefGoogle Scholar
  12. 12.
    A. V. Moroz, M. F. Limonov, M. V. Rybin, and K. B. Samusev, Phys. Solid State 53, 1105 (2011).ADSCrossRefGoogle Scholar

Copyright information

© Pleiades Publishing, Inc. 2014

Authors and Affiliations

  • I. I. Shishkin
    • 1
    • 2
  • M. V. Rybin
    • 1
    • 2
  • K. B. Samusev
    • 1
    • 2
  • M. F. Limonov
    • 1
    • 2
  • R. V. Kiyan
    • 3
  • B. N. Chichkov
    • 3
  • Yu. S. Kivshar’
    • 1
    • 4
  • P. A. Belov
    • 1
  1. 1.ITMO UniversitySt. PetersburgRussia
  2. 2.Ioffe Physical Technical InstituteRussian Academy of SciencesSt. PetersburgRussia
  3. 3.Laser Zentrum Hannover e.V.HannoverGermany
  4. 4.Nonlinear Physics CenterAustralian National University, ACTCanberraAustralia

Personalised recommendations