Fabrication of submicron structures by three-dimensional laser lithography
As a demonstration of unique capabilities of three-dimensional laser lithography, an example complex-shape microobject and photonic crystals with “woodpile” structure for the infrared spectral range are fabricated by this technique. Photonic dispersion relations for the woodpile structure are calculated for different values of the permittivity contrast and the filling factor.
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- 4.J. H. Strickler and W. W. Webb, in Proceedings of the CAN-AM Workshop of International Society for Optics and Photonics, Rochester, New York, October 9–10, 1991 (1991), p. 107.Google Scholar
- 9.J. D. Joannopoulos, S. G. Johnson, J. N. Winn, and R. D. Meade, Photonic Crystals: Molding the Flow of Light, 2nd ed. (Princeton Univ. Press, Princeton, 2008), p. 304.Google Scholar
- 10.Optical Properties of Photonic Structures: Interplay of Order and Disorder, Ed. by M. F. Limonov and R. M. De La Rue (CRC Press, Taylor and Francis Group, Boca Raton, 2012), p. 566.Google Scholar