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JETP Letters

, Volume 86, Issue 9, pp 572–576 | Cite as

Effect of the size of nanoparticles on the properties of a capacitive high-frequency discharge

Plasma, Gases

Abstract

The properties of a capacitive HF discharge with growing nanoparticles are studied with the use of kinetic PIC-MCC simulation. At the initial stage of growth, the nanoparticles are shown to be localized at the interface between the near-electrode layer and quasi-neutral plasma, where the rate of ionization by electron impact has the maximum value. At the beginning of formation of particles, plasma parameters change rapidly and a transition between the capacitive and spatial discharge burning modes is observed for a certain critical size of the particles. If the growth of the dust particles continues, their distribution over the discharge becomes more uniform and the steady-state parameters of the gas-discharge plasma hardly change.

PACS numbers

52.27.Lw 

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Copyright information

© Pleiades Publishing, Ltd. 2007

Authors and Affiliations

  1. 1.Khristianovich Institute of Theoretical and Applied Mechanics, Siberian BranchRussian Academy of SciencesNovosibirskRussia
  2. 2.University of AntwerpAntwerpBelgium

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