Advertisement

Instruments and Experimental Techniques

, Volume 61, Issue 6, pp 856–861 | Cite as

An Interference Microscope with a Low-Coherence Source and a Supersmooth Reference Mirror

  • V. L. Minaev
  • G. N. Vishnyakov
  • G. G. Levin
GENERAL EXPERIMENTAL TECHNIQUES
  • 2 Downloads

Abstract

The design and principle of operation of a Linnik-scheme-based interference microscope with a low-coherent radiation source and a reference mirror in the form of a monoatomic silicon layer are described. The microscope is designed to measure the heights of the surface profiles of reflecting objects by the phase-shifting method and provides a measurement error of up to 0.6 Å. The results of experiments on measuring the heights of monoatomic silicon layers to determine the sensitivity and on balls of silicon dioxide to assess the temporal stability of measurements are presented.

Notes

ACKNOWLEDGMENTS

This study was supported by the Ministry of Education and Science of the Russian Federation within the Agreement no. 14.625.21.0041, September 26, 2017 (the unique identifier of applied scientific research is RFMEFI62517X0041). Some studies were performed using equipment of the Center of Shared Unique Facilities in nanotechnologies (Moscow Physical and Technical Institute).

REFERENCES

  1. 1.
    Barysheva, M.M., Vainer, Yu.A., Gribkov, B.A., Zorina, M.V., Pestov, A.E., Rogachev, D.N., Sala-shchenko, N.N., and Chkhalo, N.I., Bull. Rus. Acad. Sci.: Phys., 2011, vol. 75, no. 1, p. 67.Google Scholar
  2. 2.
    Shcheglov, D.V., Kosolobov, S.S., Fedina, L.I., Ro-dyakina, E.E., Gutakovskii, A.K., Sitnikov, S.V., Kozhukhov, A.S., Zagarskikh, S.A., Kopytov, V.V., Evgrafov, V.I., Shuvalov, G.V., Matveichuk, V.F., and Latyshev, A.V., Nanotechnol. Russ., 2013, vol. 8, nos. 7–8, p. 518.CrossRefGoogle Scholar
  3. 3.
    Gorodetskii, M.L., Opticheskie mikrorezonatory s gigantskoi dobrotnost’yu (Optical Micro-Resonators with a Giant Quality Factor), Moscow: Fizmatlit, 2011.Google Scholar
  4. 4.
    Zlenko, M.A., Additivnye tekhnologii v mashinostroenii. Posobie dlya inzhenerov (Additive Technologies for Machine Building. Manual for Engineers), Nagai-tsev, M.V. and Dovbysh, V.M., Eds., Moscow: State Research Center of the Russian Federation FSUE NAMI, 2015.Google Scholar
  5. 5.
    Luo, J., Gilbert, L., Bristow, D., Landers, R., Goldstein, J., Urbas, A., and Kinzel, E., Proc. SPIE, 2016, vol. 9738, p. 97380Y. doi 10.1117/12.2218137ADSCrossRefGoogle Scholar
  6. 6.
    Klein, J., Stern, M., Franchin, G., Kayser, M., Inamura, C., Dave, S., Weaver, J.C., Houk, P., Colombo, P., Yang, M., and Oxman, N., 3D Print. Addit. Manuf., 2015, vol. 2, no. 3, p. 92. doi 10.1089/ 3dp.2015.0021Google Scholar
  7. 7.
    Vishnyakov, G.N., Levin, G.G., and Minaev, V.L., Opt. Spectrosc., 2003, vol. 95, no. 1, p. 134.ADSCrossRefGoogle Scholar
  8. 8.
    Optical Shop Testing, Malacara, D., Ed., Hoboken, NJ: Wiley, 2007.Google Scholar
  9. 9.
    Minaev, V.L., Metrologiya, 2012, no. 7, p. 19.Google Scholar
  10. 10.
    Minaev, V.L., Metrologiya, 2012, no. 8, p. 24.Google Scholar
  11. 11.
    Levin, G.G., Vishnyakov, G.N., and Minaev, V.L., Instrum. Exp. Tech., 2013, vol. 56, no. 6, p. 686. doi 10.1134/S0020441214010060CrossRefGoogle Scholar
  12. 12.
    Vishnyakov, G.N., Levin, G.G., Minaev, V.L., and Tsel’mina, I.Yu., Opt. Spectrosc., 2014, vol. 116, no. 1, p. 156. doi 10.1134/S0030400X14010226CrossRefGoogle Scholar
  13. 13.
    Vishnyakov, G.N., Levin, G.G., and Minaev, V.L., Optoelectron., Instrum. Data Process., 2017, vol. 53, no. 5, p. 530. doi 10.3103/S8756699017050132ADSCrossRefGoogle Scholar
  14. 14.
    Shcheglov, D.V., Kosolobov, S.S., Rodyakina, E.E., and Latyshev, A.V., RF Patent 2371674, Byull. Izobret., 2009, no. 30.Google Scholar
  15. 15.
    Guo, H. and Zhang, Z., Appl. Opt., 2013, vol. 52, no. 26, p. 6572. doi 10.1364/AO.52.006572ADSCrossRefGoogle Scholar
  16. 16.
    Vishnyakov, G., Levin, G., Minaev, V., and Nekrasov, N., Appl. Opt., 2015, vol. 54, no. 15, p. 4749. doi 10.1364/ AO.54.004797CrossRefGoogle Scholar

Copyright information

© Pleiades Publishing, Inc. 2018

Authors and Affiliations

  • V. L. Minaev
    • 1
  • G. N. Vishnyakov
    • 1
  • G. G. Levin
    • 1
  1. 1.All-Russian Research Institute of Optical and Physical MeasurementsMoscowRussia

Personalised recommendations