Inorganic Materials

, Volume 54, Issue 14, pp 1417–1420 | Cite as

Electron Probe X-Ray Analysis of Nanofilms at Off-Normal Incidence of the Electron Beam

  • S. A. DarznekEmail author
  • V. B. Mityukhlyaev
  • P. A. Todua
  • M. N. FilippovEmail author


The frontier of the electron probe X-ray spectral method in the determination of trace metal quantities on a silicon substrate is studied. The experimental data are acquired for ultrathin chromium films on a silicon substrate. It is shown that the signal-to-noise ratio significantly increases at a noticeable sample inclination (80°), which allows one to determine an extremely low (available by this approach) chromium content. The calibration curve for the inclined sample position is plotted using the Monte Carlo method. The surface concentration of chromium atoms (2.2 ± 0.4) × 1014 cm–2 and the chromium detection limit (5 × 1013 cm–2) are measured under the given experimental conditions. For the electron probe X-ray microanalysis of bulk samples, it is a record value. The equivalent weight of chromium at the aforementioned surface concentration is approximately 4 × 10–18 g. The proposed technique requires no changes in the design of the device to be applied.


electron probe X-ray analysis nanofilms detection limit chromium silicon substrate 



This work was supported by the Russian Science Foundation (agreement no. 14-19-01652 from June 27, 2014).


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© Pleiades Publishing, Inc. 2018

Authors and Affiliations

  1. 1.Research Center for Studying the Properties of Surfaces and VacuumMoscowRussia
  2. 2.Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of SciencesMoscowRussia

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