Inorganic Materials

, Volume 54, Issue 14, pp 1412–1416 | Cite as

Electron Probe X-Ray Spectral Analysis of Nanoparticles

  • S. A. Darznek
  • V. B. Mityukhlyaev
  • P. A. Todua
  • M. N. FilippovEmail author


Two approaches for improving the resolution via electron probe X-ray spectral microanalysis (EPXRSMA) are considered for the characterization of the nanoparticle composition. The first approach implies the use of L and M series as the analytical ultrasoft X-ray lines of the characteristic radiation of elements to be detected, which are excited by the low-energy electrons (less than 5 keV). The quantitative EPXRSMA, involving a new way for calculating the matrix element correction, is elaborated for this approach. The extrapolation route for the construction of the calibration characteristic is extended to all elements with Z > 40. The second approach is based on the use of the analytical signal caused by only the excitation by electrons of the probe. The achieved lateral resolution is about 2 nm, and the depth resolution is 20–60 nm. The minimal determined mass of the substance is approximately (1–2.5) × 10–21 g, which corresponds to 10–30 atoms of the detected elements.


electron probe X-ray spectral microanalysis (EPXRSMA) resolution detection limit nanoparticles 



This work was supported by the Russian Science Foundation (agreement no. 14-19-01652 from June 27, 2014).


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Copyright information

© Pleiades Publishing, Inc. 2018

Authors and Affiliations

  • S. A. Darznek
    • 1
  • V. B. Mityukhlyaev
    • 2
  • P. A. Todua
    • 2
  • M. N. Filippov
    • 1
    • 2
    Email author
  1. 1.Research Center for Studying the Properties of Surfaces and VacuumMoscowRussia
  2. 2.Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of SciencesMoscowRussia

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