Preparation of Graphene on Copper Substrates of Various Geometries by Chemical Vapor Deposition
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In this paper, we examine the key features of the preparation of graphene by chemical vapor deposition on copper substrates differing in geometry (foil and wire). Along with graphene, we analyze impurity structures forming on the surface of copper substrates as a result of graphene synthesis and discuss their origin and possible ways of eliminating them.
Keywords:CVD reactor graphene impurity particles
This work was supported by the Russian Federation Ministry of Education and Science, state research target nos. 3.1414.2017/PCh and 3.7131.2017/VU.
We are grateful to O.V. Gradov (Talroze Institute of Energy Problems of Chemical Physics, Russian Academy of Sciences) for helpful discussions of the experimental data and to the personnel of the OOO AkKoLab for the use of their equipment.
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