Inorganic Materials

, Volume 48, Issue 1, pp 34–39 | Cite as

Electrical conductivity and optical properties of thin carbon films grown from ethanol vapor

  • D. M. Sedlovets
  • A. N. Red’kin
  • V. I. Korepanov
  • O. V. Trofimov
Article

Abstract

Transparent, ultrathin carbon films have been grown through the pyrolysis of ethanol vapor at a reduced pressure on copper substrates at temperatures from 600 to 950°C. The electrical conductivity of the films increases with deposition temperature. Depending on deposition temperature, ethanol vapor pyrolysis may follow different mechanisms and the carbon deposition process has different key features, which influence the properties of the films. In the range 600–750°C, ethanol vapor pyrolysis is a catalytic process, which results in selective growth of a thin carbon film with an optical transmittance of ∼95% only on the copper surface. At higher temperatures, carbon deposition is nonselective, and the resultant films are darker. The carbon deposition mechanism is discussed in relation to the ethanol vapor pyrolysis temperature. The present results suggest that carbon deposition from ethanol vapor is a promising approach to producing transparent, conductive carbon films.

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Copyright information

© Pleiades Publishing, Ltd. 2012

Authors and Affiliations

  • D. M. Sedlovets
    • 1
  • A. N. Red’kin
    • 1
  • V. I. Korepanov
    • 1
  • O. V. Trofimov
    • 1
  1. 1.Institute of Microelectronics Technology and High-Purity MaterialsRussian Academy of SciencesChernogolovka, Moscow oblastRussia

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