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Inorganic Materials

, Volume 46, Issue 2, pp 154–162 | Cite as

Growth of thin ZnO films by ultrasonic spray pyrolysis

  • V. V. Kireev
  • L. N. Dem’yanets
  • L. E. Li
  • V. V. Artemov
Article

Abstract

We report the growth of high-quality thin ZnO films with controlled microstructure on Si(111) substrates by ultrasonic spray pyrolysis of Zn-containing solutions.

Keywords

Zinc Oxide Spray Pyrolysis Zinc Acetate Ultrasonic Spray Pyrolysis Zinc Nitrate Solution 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    Özgür Ü., Alivov, Ya.I., Liu, C., et al., Comprehensive Review of ZnO Materials and Devices, J. Appl. Phys., 2005, vol. 98, pp. 041301–041310.CrossRefGoogle Scholar
  2. 2.
    Schmidt-Mende, L. and MacManus-Driscoll, J.L., ZnO—anostructures, Defects, and Devices, Mater. Today, 2007, vol. 10, no. 5, pp. 40–48.CrossRefGoogle Scholar
  3. 3.
    Pearton, S.J., Norton, D.P., Heo, Y.W., et al., Recent Progress in Processing and Properties of ZnO, Prog. Mater. Sci., 2005, vol. 50, no. 3, pp. 293–340.CrossRefGoogle Scholar
  4. 4.
    Yi, G.-C., Wang, C., and Park, W.I., ZnO Nanorods: Synthesis, Characterization and Applications, Semicond. Sci. Technol., 2005, vol. 20, pp. S22–S34.CrossRefGoogle Scholar
  5. 5.
    Bao, J., Zimmler, M.A., Capasso, F., et al., Broadband ZnO Single-Nanowire Light-Emitting Diode, Nano Lett., 2006, vol. 6, no. 8, pp. 1719–1722.CrossRefGoogle Scholar
  6. 6.
    Yuen, C., Yu, S.F., Lau, S.P., and Chen, G.C.K., Design and Fabrication of ZnO Light-Emitting Devices Using Filtered Cathodic Vacuum Arc Technique, J. Cryst. Growth, 2006, vol. 287, no. 1, pp. 204–212.CrossRefGoogle Scholar
  7. 7.
    Willander, M., Al Hilli, S.M., and Nur, O., Zinc Oxide Structures for Chemical Sensors. New Materials for Micro-Scale Sensors and Actuators-An Engineering Review, Mater. Sci. Eng. Rep., 2007, vol. 56, nos. 1–6, pp. 31–38.Google Scholar
  8. 8.
    Hongsith, N., Viriyaworasakul, C., Mangkorntong, P., et al., Ethanol Sensor Based on ZnO and Au-Doped ZnO Nanowires, Ceram. Int., 2008, vol. 34, no. 4, pp. 823–826.CrossRefGoogle Scholar
  9. 9.
    Suh, D.-I., Lee, S.-Y., Kim, T.-H., et al., The Fabrication and Characterization of Dye-Sensitized Solar Cells with a Branched Structure of ZnO Nanowires, Chem. Phys. Lett., 2007, vol. 442, nos. 4–6, pp. 348–353.CrossRefGoogle Scholar
  10. 10.
    Wang, X., Zhou, J., Song, J., et al., Piezoelectric Field Effect Transistor and Nanoforce Sensor Based on a Single ZnO Nanowire, Nano Lett., 2006, vol. 6, no. 12, pp. 2768–2772.CrossRefGoogle Scholar
  11. 11.
    Chu, S.-Y., Chen, T.-Y., and Water, W., The Investigation of Preferred Orientation Growth of ZnO Films on the PbTiO3-Based Ceramics and Its Application for SAW Devices, J. Cryst. Growth, 2003, vol. 257, nos. 3–4, pp. 280–285.CrossRefGoogle Scholar
  12. 12.
    Transparent Conductive Zinc Oxide, vol. 104 of Springer Series in Materials Science, Ellmer K. et al., Eds., Springer: Berlin, 2008.Google Scholar
  13. 13.
    Yao, W.-T. and Yu, S.-H., Recent Advances in Hydrothermal Syntheses of Low Dimensional Nanoarchitectures, Int. J. Nanotechnol., 2007, vol. 4, nos. 1–2, pp. 129–162.CrossRefGoogle Scholar
  14. 14.
    Chen, L., Bao, N., Yamagisawa, K., et al., Controlled Synthesis and Assembly of Nanostructured ZnO Architectures by a Solvothermal Soft Chemistry Process, Cryst. Growth Des., 2007, vol. 7, no. 12, pp. 2742–2748.CrossRefGoogle Scholar
  15. 15.
    Elias, J., Tena-Zaera, R., and Lévy-Clément, C., Effect of the Chemical Nature of the Anions on the Electrodeposition of ZnO Nanowire Arrays, J. Phys. Chem. C, 2008, vol. 112, no. 15, pp. 5736–5741.CrossRefGoogle Scholar
  16. 16.
    Ren, S., Bai, Y.F., Chen, J., et al., Catalyst-Free Synthesis of ZnO Nanowire Arrays on Zinc Substrate by Low Temperature Thermal Oxidation, Mater. Lett., 2007, vol. 61, no. 3, pp. 666–670.CrossRefGoogle Scholar
  17. 17.
    Chang, S.P., Chang, S.J., Chiou, Y.Z., et al., ZnO Epitaxial Layers Grown on Nitridated Si(100) Substrate with HT-GaN/LT-ZnO Double Buffer. J. Cryst. Growth, 2008, vol. 310, no. 2, pp. 290–294.CrossRefGoogle Scholar
  18. 18.
    Hong, R.J., Jiang, X., Szyszka, B., et al., Comparison of the ZnO:Al Films Deposited in Static and Dynamic Modes by Reactive Mid-Frequency Magnetron Sputtering, J. Cryst. Growth, 2003, vol. 253, nos. 1–4, pp. 117–128.CrossRefGoogle Scholar
  19. 19.
    Hsu, H.-C., Tseng, Y.-K., Cheng, H.-M., et al., Selective Growth of ZnO Nanorods on Pre-Coated ZnO Buffer Layer, J. Cryst. Growth, 2004, vol. 261, no. 4, pp. 520–525.CrossRefGoogle Scholar
  20. 20.
    Liu, X., Wu, X., Cao, H., and Chang, R.P.H., Growth Mechanism and Properties of ZnO Nanorods Synthesized by Plasma-Enhanced Chemical Vapor Deposition, J. Appl. Phys., 2004, vol. 95, no. 6, pp. 3141–3147.CrossRefGoogle Scholar
  21. 21.
    Dem’yanets, L.N., Li, L.E., and Uvarova, T.G., Hydrothermal Synthesis and Cathodoluminescence of ZnO Crystalline Powders and Coatings, J. Cryst. Growth, 2006, vol. 287, pp. 23–27.CrossRefGoogle Scholar
  22. 22.
    Liu, T.Q., Sakurai, O., Mizutani, N., and Kato, M., Preparation of Spherical Fine ZnO Particles by the Spray Pyrolysis Method Using Ultrasonic Atomization Techniques, J. Mater. Sci., 1986, vol. 21, no. 10, pp. 3698–3702.CrossRefGoogle Scholar
  23. 23.
    Htay, M., Tani, Y., Hashimoto, Y., and Ito, K., Synthesis of Optical Quality ZnO Nanowires Utilizing Ultrasonic Spray Pyrolysis, J. Mater. Sci.: Mater. Electron., 2009, vol. 20, pp. 341–345.CrossRefGoogle Scholar
  24. 24.
    Krunks, K., Bijakina, O., Mikli, V., et al., Zinc Oxide Thin Films by Spray Pyrolysis Method, Phys. Scr., 1999, vol. 79, pp. 209–212.CrossRefGoogle Scholar
  25. 25.
    Zhao, J.-L., Li, X.-M., Zhang, S., et al., Highly (002)-Oriented ZnO Film Grown by Ultrasonic Spray Pyrolysis on ZnO-Seeded Si (100) Substrate, Mater. Today, 2006, vol. 21, pp. 2185–2190.Google Scholar
  26. 26.
    Giolando, D.-M., Taha, A., Al-Qaisi, S., et al., Application of Spray Pyrolysis Metal Oxide Thin Films for Photovoltaic Applications, 2nd Int. Energy Conversion Engineering Conf., AIAA-2004-2754, Providence, RI, 2004.Google Scholar
  27. 27.
    Tani, T., Mädle, L., and Pratsinis, S.E., Homogeneous ZnO Nanoparticles by Flame Spray Pyrolysis, J. Nanopart. Res., 2002, vol. 4, no. 4, pp. 337–343.CrossRefGoogle Scholar

Copyright information

© Pleiades Publishing, Ltd. 2010

Authors and Affiliations

  • V. V. Kireev
    • 1
  • L. N. Dem’yanets
    • 1
  • L. E. Li
    • 1
  • V. V. Artemov
    • 1
  1. 1.Shubnikov Institute of CrystallographyRussian Academy of SciencesMoscowRussia

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