Inorganic Materials

, Volume 46, Issue 2, pp 154–162 | Cite as

Growth of thin ZnO films by ultrasonic spray pyrolysis

  • V. V. Kireev
  • L. N. Dem’yanets
  • L. E. Li
  • V. V. Artemov


We report the growth of high-quality thin ZnO films with controlled microstructure on Si(111) substrates by ultrasonic spray pyrolysis of Zn-containing solutions.


Zinc Oxide Spray Pyrolysis Zinc Acetate Ultrasonic Spray Pyrolysis Zinc Nitrate Solution 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Pleiades Publishing, Ltd. 2010

Authors and Affiliations

  • V. V. Kireev
    • 1
  • L. N. Dem’yanets
    • 1
  • L. E. Li
    • 1
  • V. V. Artemov
    • 1
  1. 1.Shubnikov Institute of CrystallographyRussian Academy of SciencesMoscowRussia

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