Semiconductors

, Volume 36, Issue 10, pp 1180–1183 | Cite as

Crystallization of amorphous hydrogenated silicon films deposited under various conditions

  • O. A. Golikova
  • E. V. Bogdanova
  • U. S. Babakhodzhaev
Amorphous, Vitreous, and Porous Semiconductors

Abstract

The possibility of using the magnetron-assisted silane decomposition technique for the deposition of a-Si:H films as the basic materials for the production of polysilicon is analyzed. It is shown how specific features of the film structure affect the crystallization process.

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Copyright information

© MAIK "Nauka/Interperiodica" 2002

Authors and Affiliations

  • O. A. Golikova
    • 1
  • E. V. Bogdanova
    • 1
  • U. S. Babakhodzhaev
    • 1
  1. 1.Ioffe Physicotechnical InstituteRussian Academy of SciencesSt. PetersburgRussia

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