, Volume 36, Issue 10, pp 1180–1183 | Cite as

Crystallization of amorphous hydrogenated silicon films deposited under various conditions

  • O. A. Golikova
  • E. V. Bogdanova
  • U. S. Babakhodzhaev
Amorphous, Vitreous, and Porous Semiconductors


The possibility of using the magnetron-assisted silane decomposition technique for the deposition of a-Si:H films as the basic materials for the production of polysilicon is analyzed. It is shown how specific features of the film structure affect the crystallization process.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    M. Sudhar, D. D. Cyung, W. A. Anderson, and J. Coleman, Mater. Res. Soc. Symp. Proc. 356, 921 (1995).Google Scholar
  2. 2.
    A. Szekeres, M. Garther, F. Vasiliu, et al., J. Non-Cryst. Solids 227–230, 954 (1998).Google Scholar
  3. 3.
    N. H. Nickel, Mater. Res. Soc. Symp. Proc. 378, 381 (1995).Google Scholar
  4. 4.
    O. A. Golikova, A. N. Kuznetsov, V. Kh. Kudoyarova, et al., Fiz. Tekh. Poluprovodn. (St. Petersburg) 34, 86 (2000) [Semiconductors 34, 87 (2000)].Google Scholar
  5. 5.
    K. Pangal, J. C. Sturm, and S. Wagner, Mater. Res. Soc. Symp. Proc. 507, 577 (1998).Google Scholar
  6. 6.
    P. Lengsfield, N. H. Nickel, and W. Fuhs, in Abstracts of ICAMS-18, USA, 1999, FA2.1.Google Scholar
  7. 7.
    O. A. Golikova, M. M. Kazanin, O. I. Kon’kov, et al., Fiz. Tekh. Poluprovodn. (St. Petersburg) 30, 405 (1996) [Semiconductors 30, 226 (1996)].Google Scholar
  8. 8.
    K. Akiyama, A. Ogiwara, and H. Ogawa, Jpn. J. Appl. Phys., Part 1 33, 5793 (1994).CrossRefGoogle Scholar
  9. 9.
    P. Roca y Cabarrocas, N. Layadi, and M. Kunst, in Proceedings of the 14th European Photovoltaic Solar Energy Conference, Spain, 1997, P5A.20.Google Scholar
  10. 10.
    S. Vignoli, R. Butte, R. Meaudre, et al., J. Phys.: Condens. Matter 11, 8749 (1999).ADSCrossRefGoogle Scholar
  11. 11.
    O. A. Golikova and M. M. Kazanin, Fiz. Tekh. Poluprovodn. (St. Petersburg) 33, 110 (1999) [Semiconductors 33, 97 (1999)].Google Scholar
  12. 12.
    Yu. He, Ch. Yin, G. Cheng, and L. Wang, J. Appl. Phys. 75, 797 (1994).ADSGoogle Scholar
  13. 13.
    M. Fyta, I. Remediakis, P. C. Kelires, and E. Kaxiras, in Abstracts of the ICAMS-19, France, 2001, Th-B3/2.Google Scholar

Copyright information

© MAIK "Nauka/Interperiodica" 2002

Authors and Affiliations

  • O. A. Golikova
    • 1
  • E. V. Bogdanova
    • 1
  • U. S. Babakhodzhaev
    • 1
  1. 1.Ioffe Physicotechnical InstituteRussian Academy of SciencesSt. PetersburgRussia

Personalised recommendations