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Formation of periodical microstructures using interference lithography

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Authors and Affiliations

  1. Department of Physics of Kaunas, University of Technology, Studentu g. 50, Lithuania

    T. Tamulevičius (MSc student)

  2. Institute of Physical Electronics of Kaunas, University of Technology, Sav-anoriu av. 271, Kaunas, LT, Lithuania

    S. Tamulevičius (professor)

  3. Department of General Chemistry, Kaunas University of Technology, Radvilėnų pl. 19, Lithuania

    M. Andrulevičius (professor)

  4. Department of surfaces and thin films at the Institute of Physical Electronics of Kaunas, University of Technology, Savanoriu av. 271, Kaunas, LT., Lithuania

    M. Andrulevičius (professor)

  5. Department of General Chemistry, Kaunas University of Technology, Radvilėnų pl. 19, Lithuania

    E. Griškonis (professor)

  6. Department of development and implementation, Institute of Physical Electronics of Kaunas, University of Technology, Savanoriu av. 271, Kaunas, LT., Lithuania

    E. Griškonis (professor)

  7. Department of Physics of Kaunas, University of Technology, Studentu g. 50, LT-51368, Kaunas, LT., Lithuania

    L. Puodžiukynas (professor)

  8. International Studies Center of Kaunas, University of Technology, Mickeviciaus 37, Kaunas, LT., Lithuania

    G. Janušas (PhD student)

  9. Department of microlithography, Institute of Physical Electronics of Kaunas, University of Technology, Savanoriu av. 271, Lithuania

    A. Guobienė (professor)

  10. International Studies Center of Kaunas, University of Technology, Mickeviciaus 37, Kaunas, LT., Lithuania

    A. Guobienė (professor)

Authors
  1. T. Tamulevičius
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  2. S. Tamulevičius
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  3. M. Andrulevičius
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  4. E. Griškonis
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  5. L. Puodžiukynas
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  6. G. Janušas
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  7. A. Guobienė
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Tamulevičius, T., Tamulevičius, S., Andrulevičius, M. et al. Formation of periodical microstructures using interference lithography. Exp Tech 32, 23–28 (2008). https://doi.org/10.1111/j.1747-1567.2007.00291.x

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  • DOI: https://doi.org/10.1111/j.1747-1567.2007.00291.x

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