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Carbonaceous grating techniques for AFM moiré and SEM moiré

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A careful study of carbonaceous grating based on contamination in SEM chamber and testing specimen is presented. The new technique is more convenient than that based on electron beam lithography. Good agreements between experimental results and theoretical calculations have verified the feasibility of using the carbonaceous grating for AFM moiré and SEM moiré.

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Authors and Affiliations

  1. Department of Materials Science and Mechanics, Michigan State University, East Lansing, MI, USA

    D. Liu (SEM Member, Professor) & H. Chen (Graduate Student)

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  1. D. Liu
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  2. H. Chen
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Liu, D., Chen, H. Carbonaceous grating techniques for AFM moiré and SEM moiré. Exp Tech 25, 26–29 (2001). https://doi.org/10.1111/j.1747-1567.2001.tb00021.x

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  • DOI: https://doi.org/10.1111/j.1747-1567.2001.tb00021.x

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