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Correction for system compliance during point-loading of thin brittle films

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References

  1. Doerner, M.F. and Nix, W.D., “Analysis of the Accuracy of the Bulge Test in Determining the Mechanical Properties of Thin Films,” J. of Mat. Res., 7, 1553–1563 (1992).

    Article  Google Scholar 

  2. Beetz, C.P, Jr., Cooper, C.V. and Perry, T.A., “Ultralow-Load Indentation Hardness and Modulus of Diamond Films Deposited by Hot-Filament-assisted CVD,” J. Mat. Res., 5, 2555–2561 (1990).

    Article  Google Scholar 

  3. O’Hern, M.E. and McHargue, C.J., “Mechanical Properties Testing of Diamond and Diamond-Like Films by Ultra-Low Load Indentation,” Diamond and Diamond-Like Films and Coatings, Plenum Press, New York (1991).

    Google Scholar 

  4. McHargue, C.J., “Indentation Testing of Thin Films and Hard Materials,” Diamond and Diamond-Like Films and Coatings, Plenum Press, New York (1991).

    Google Scholar 

  5. Hong, S., Weihs, T.P., Bravman, J.C. and Nix, W.D., “Measuring Stuffiness and Residual stresses of Silicon Nitride Thin Films,” J. of Electronic Mat., 19, 903–909 (1990).

    Article  Google Scholar 

  6. Glime, W.H. and Case, E.D., “Deflection Behavior of Point-loaded CVD Diamond Thin Film Diaphragms,” Proc. Amer. Soc. for Composites 8th Tech. Conf. on Composite Materials, Technical Publications, Lancaster, PA (1993).

    Google Scholar 

  7. Timoshenko, S. and Woinowsky-Krieger, S., Theory of Plates and Shells, McGraw-Hill, New York (1959).

    Google Scholar 

  8. ASTM D 3379-75, “Standard Test for Tensile Strength and Youngs Modulus for High-Modulus Single-Filament Materials,” Annual Book of ASTM Standards, 15.03. Philadelphia, PA, 128 (1994).

  9. Reismann, H., Elastic Plates: Theory and Application, John Wiley & Sons, New York (1988).

    Google Scholar 

  10. Pilkey, W.D. Formulas for Stress, Strain, and Structural Matrices, John Wiley & Sons, New York, (1994).

    Google Scholar 

  11. Way, S., “Bending of Circular Plates with Large Deflection,” Trans. Amer. Soc. of Mech. Eng., APM-56-12, 627–636 (1939).

  12. Mah G.B.J., “Axisymmetric Finite Deflection of Circular Plates,” J. Eng. Mech. Div., ASCE, 95, (EM 5), 1125–1143 (1969).

    Google Scholar 

  13. Abe, H. and Utsui, M., “On the Large Axisymmetrical Deflection of Thin Plates Made of the Mooney-Rivlin Material,” J. Appl. Mech., Trans. ASME, 725–730 (Sept. 1974).

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Liu, C., Case, E.D. Correction for system compliance during point-loading of thin brittle films. Exp Tech 21, 28–31 (1997). https://doi.org/10.1111/j.1747-1567.1997.tb00506.x

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