References
Doerner, M.F. and Nix, W.D., “Analysis of the Accuracy of the Bulge Test in Determining the Mechanical Properties of Thin Films,” J. of Mat. Res., 7, 1553–1563 (1992).
Beetz, C.P, Jr., Cooper, C.V. and Perry, T.A., “Ultralow-Load Indentation Hardness and Modulus of Diamond Films Deposited by Hot-Filament-assisted CVD,” J. Mat. Res., 5, 2555–2561 (1990).
O’Hern, M.E. and McHargue, C.J., “Mechanical Properties Testing of Diamond and Diamond-Like Films by Ultra-Low Load Indentation,” Diamond and Diamond-Like Films and Coatings, Plenum Press, New York (1991).
McHargue, C.J., “Indentation Testing of Thin Films and Hard Materials,” Diamond and Diamond-Like Films and Coatings, Plenum Press, New York (1991).
Hong, S., Weihs, T.P., Bravman, J.C. and Nix, W.D., “Measuring Stuffiness and Residual stresses of Silicon Nitride Thin Films,” J. of Electronic Mat., 19, 903–909 (1990).
Glime, W.H. and Case, E.D., “Deflection Behavior of Point-loaded CVD Diamond Thin Film Diaphragms,” Proc. Amer. Soc. for Composites 8th Tech. Conf. on Composite Materials, Technical Publications, Lancaster, PA (1993).
Timoshenko, S. and Woinowsky-Krieger, S., Theory of Plates and Shells, McGraw-Hill, New York (1959).
ASTM D 3379-75, “Standard Test for Tensile Strength and Youngs Modulus for High-Modulus Single-Filament Materials,” Annual Book of ASTM Standards, 15.03. Philadelphia, PA, 128 (1994).
Reismann, H., Elastic Plates: Theory and Application, John Wiley & Sons, New York (1988).
Pilkey, W.D. Formulas for Stress, Strain, and Structural Matrices, John Wiley & Sons, New York, (1994).
Way, S., “Bending of Circular Plates with Large Deflection,” Trans. Amer. Soc. of Mech. Eng., APM-56-12, 627–636 (1939).
Mah G.B.J., “Axisymmetric Finite Deflection of Circular Plates,” J. Eng. Mech. Div., ASCE, 95, (EM 5), 1125–1143 (1969).
Abe, H. and Utsui, M., “On the Large Axisymmetrical Deflection of Thin Plates Made of the Mooney-Rivlin Material,” J. Appl. Mech., Trans. ASME, 725–730 (Sept. 1974).
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Liu, C., Case, E.D. Correction for system compliance during point-loading of thin brittle films. Exp Tech 21, 28–31 (1997). https://doi.org/10.1111/j.1747-1567.1997.tb00506.x
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DOI: https://doi.org/10.1111/j.1747-1567.1997.tb00506.x