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Scanning interferometry

Measuring microscale devices

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Improvements in interferometry have made it a powerful and attractive technique for characterizing tiny devices based on microelectromechanical systems.

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Figure 1: An interferometry measurement of a MEMS piezoelectric pressure sensor.
Figure 2
Figure 3: Thin-film imaging.

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  1. Taylor Hobson, PO Box 36, 2 New Star Road, LE4 9JQ, Leicester, UK

    Mike Conroy & Daniel Mansfield

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  1. Mike Conroy
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  2. Daniel Mansfield
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Correspondence to Mike Conroy.

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Conroy, M., Mansfield, D. Measuring microscale devices. Nature Photon 2, 661–663 (2008). https://doi.org/10.1038/nphoton.2008.216

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