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Scanning electron microscopy

Second best no more

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Secondary electron imaging in electron microscopy can achieve resolutions that compete with transmission electron microscopy, and allows imaging of both surface and bulk atoms simultaneously.

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Figure 1: Secondary electron image of interconnect lines in a semiconductor device.
Figure 2: Secondary electron image of gold particles on a cell surface recorded at 3 keV on a Hitachi S4700 field-emission SEM.

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  1. David C. Joy is in the Department of Materials Science and Engineering, University of Tennessee, Knoxville, Tennessee 37996, USA, and at The Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831, USA. djoy@utk.edu,

    David C. Joy

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  1. David C. Joy
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Joy, D. Second best no more. Nature Mater 8, 776–777 (2009). https://doi.org/10.1038/nmat2538

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