Skip to main content
Log in

Semiconductor technology

Imprints offer Moore

  • News & Views
  • Published:

From Nature

View current issue Submit your manuscript

The cost of making chip components smaller using photolithographic printing might soon invalidate Moore's law. A new imprinting technique that can reproduce features as small as 10 nm could save it.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Figure 1: A new recipe for silicon chips?

References

  1. Moore, G. E. Electronics 38, 19 April (1965); http://www.intel.com/research/silicon/moorespaper.pdf

  2. Moore, G. E. Wired 5.05 (1997).

  3. Chou, S. Y., Keimel, C. & Gu, J. Nature 417, 835–837 (2002).

    Article  ADS  CAS  Google Scholar 

  4. Chou, S. Y., Krauss, P. R. & Renstrom, P. S. Science 272, 85–87 (1996).

    Article  ADS  CAS  Google Scholar 

  5. Xia, Y. & Whitesides, G. Annu. Rev. Mater. Sci. 28, 153–184 (1998).

    Article  ADS  CAS  Google Scholar 

  6. Resnik, D. J. et al. in Emerging Lithographic Technologies VI (ed. Engelstad, R. L.) Proc. SPIE 4688 (in the press).

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to R. Fabian Pease.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Pease, R. Imprints offer Moore. Nature 417, 802–803 (2002). https://doi.org/10.1038/417802a

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1038/417802a

  • Springer Nature Limited

This article is cited by

Navigation