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Semiconductors

An eye for impurity

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As electronic devices become smaller, so the challenge of maintaining their electrical properties grows. Identifying the positions of introduced impurities in a semiconductor crystal is a major first step.

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Figure 1: The electron probe of a scanning transmission electron microscope propagates along a column of silicon atoms in the semiconductor lattice.

P. M. VOYLES

References

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  1. the College of Engineering, University of Wisconsin, 1415 Engineering Drive, Madison, 53706-1691, Wisconsin, USA

    Paul S. Peercy

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  1. Paul S. Peercy
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Correspondence to Paul S. Peercy.

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Peercy, P. An eye for impurity. Nature 416, 799–801 (2002). https://doi.org/10.1038/416799a

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