Kinetics of Dichlorosilane Separation from a Mixture of Chlorosilanes by Distillation Using a Regular Packing

  • V. M. Vorotyntsev
  • G. M. Mochalov
  • M. A. Kolotilova


Trichlorosilane disproportionation followed by dichlorosilane separation from the resulting mixture of silicon compounds in a regularly packed distillation column is considered. The dynamic and mass-transfer properties of the regular packing are studied theoretically and experimentally. Kinetic data are calculated for distillation in a column with a bottom reboiler operated in the discrete dichlorosilane drawoff mode. The calculated data are in satisfactory agreement with experimental data.


Silicon Experimental Data Kinetic Data Disproportionation Satisfactory Agreement 
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Copyright information

© MAIK “Nauka/Interperiodica” 2004

Authors and Affiliations

  • V. M. Vorotyntsev
    • 1
  • G. M. Mochalov
    • 1
  • M. A. Kolotilova
    • 1
  1. 1.Nizhni Novgorod State Technical University, ulMininaRussia

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