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High, Low, and Fast-Varying Pressure Gauges

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Abstract

The development of measuring pressure transducers including manometers and silicon and III–V semiconductor gauges is considered. The modern principles of automation of high-quality transducer production and design technologies are discussed.

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Authors and Affiliations

  1. Federal Unitary State Enterprise Scientific-Research Institute of Semiconducting Materials, Russia

    N. P. Krivorotov

  2. Joint Stock Company Manotom', Tomsk, Russia

    Yu. G. Svinolupov

Authors
  1. N. P. Krivorotov
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  2. Yu. G. Svinolupov
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Krivorotov, N.P., Svinolupov, Y.G. High, Low, and Fast-Varying Pressure Gauges. Russian Physics Journal 46, 623–630 (2003). https://doi.org/10.1023/B:RUPJ.0000008189.38378.a6

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  • DOI: https://doi.org/10.1023/B:RUPJ.0000008189.38378.a6

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