Abstract
Rapid progress in semiconductor electronics and transition from micro- to nanoelectronics result from progressively smaller dimensions of complementary metal-oxide-semiconductor (CMOS) transistors, development of new single-electron devices, and optical and quantum logical elements. The development of nanotechnologies is an integral part of this process. The present paper reviews the current status of research in molecular-beam epitaxy performed at the Institute of Semiconductor Physics of the Siberian Branch of the Russian Academy of Sciences (Novosibirsk).
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Aseev, A.L., Pchelyakov, O.P. & Toropov, A.I. Physics and Technology of III–V Heterostructures: Current Status and Trends in the Development. Russian Physics Journal 46, 552–558 (2003). https://doi.org/10.1023/B:RUPJ.0000008180.02939.53
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DOI: https://doi.org/10.1023/B:RUPJ.0000008180.02939.53