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Preparation of High-Purity Silicon Tetrafluoride by Thermal Dissociation of Na2SiF6

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Abstract

The possibility of preparing high-purity silicon tetrafluoride by the thermal dissociation of pure grade Na2SiF6 was studied. The impurity composition of the product was studied by IR and atomic emission spectroscopy and by mass spectrometry.

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Authors and Affiliations

  1. Institute of Chemistry of Ultrapure Substances, Russian Academy of Sciences, Nizhni Novgorod, Russia

    A. D. Bulanov, D. A. Pryakhin & V. V. Balabanov

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  1. A. D. Bulanov
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  2. D. A. Pryakhin
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  3. V. V. Balabanov
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Bulanov, A.D., Pryakhin, D.A. & Balabanov, V.V. Preparation of High-Purity Silicon Tetrafluoride by Thermal Dissociation of Na2SiF6 . Russian Journal of Applied Chemistry 76, 1393–1395 (2003). https://doi.org/10.1023/B:RJAC.0000012654.22326.e5

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  • DOI: https://doi.org/10.1023/B:RJAC.0000012654.22326.e5

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