Abstract
A method for evaluating the hardness of coatings with nanosize thickness is suggested. The method includes the determination of the hardness of the “coating-substrate” composition by indenting the coating and subsequent computation of the hardness with the use of the additivity rule. This requires determination of the thickness of the coating, of the hardness of the substrate, and of the indentation depth.
Similar content being viewed by others
REFERENCES
S. R. J. Saunders and H. R. Vetters, Thin Solid Films, 299, 82 (1997).
GOST 9450-76, Measurement of Microhardness by the Method of Indentation of Diamond Tips [in Russian].
GOST 10717-75, Equipment for Measuring Microhardness [in Russian].
A. G. Kalmykov, Yu. I. Golovin, V. F. Terent'ev, et al., Methods for Determining the Hardness of Metallic Materials [in Russian], Izd. VGTU, Voronezh (2000).
S. J. Vepfek, J. Vacuum Sci. & Technol. A, 17(5), 2401 (1999).
R. A. Andrievskii and I. I. Spivak, Hardness of Refractory Compounds and Materials Based on Them. A Reference Book [in Russian], Metallurgiya, Chelyabinsk (1989).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Bykov, Y.A., Karpukhin, S.D., Panfilov, Y.V. et al. Measurement of the Hardness of Thin Films. Metal Science and Heat Treatment 45, 396–399 (2003). https://doi.org/10.1023/B:MSAT.0000009788.88059.14
Issue Date:
DOI: https://doi.org/10.1023/B:MSAT.0000009788.88059.14