Abstract
The physical and technological aspects of the manufacture of microelectromechanical systems (i-MEMS) are considered. An optimal design for a strain gage based on an n-type (001) silicon membrane is discussed.
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Tolstenok, O.A., Kholomina, T.A. Design and Technological Features of Measuring-Transducing Microelectromechanical Systems Based on Silicon Sensors. Measurement Techniques 47, 842–849 (2004). https://doi.org/10.1023/B:METE.0000047706.12140.a5
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DOI: https://doi.org/10.1023/B:METE.0000047706.12140.a5