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Improving the Calibration of Vacuum Gas Flow – Control Leak Gauges

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Measurement Techniques Aims and scope

Abstract

A new and original method of calibrating helium leaks that makes it possible to take into account the existence of a number of auxiliary phenomena is described. For this purpose, a hollow leak the purpose of which is to reproduce only desorbed gas flows, is introduced into the vacuum system of the calibration bench. Analysis of the results of corresponding cumulation measurements makes it possible to introduce corrections for these phenomena.

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REFERENCES

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Authors
  1. V. V. Kuz'min
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Kuz'min, V.V. Improving the Calibration of Vacuum Gas Flow – Control Leak Gauges. Measurement Techniques 47, 568–570 (2004). https://doi.org/10.1023/B:METE.0000039761.83211.4a

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  • DOI: https://doi.org/10.1023/B:METE.0000039761.83211.4a

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