Abstract
The displacements of the light-sensing elements of a CCD matrix in the course of thermal stabilization after the CCD matrix has been switched on are measured. It is shown that the deformations in the matrix exhibit high isotropicity. The uncertainty in the determination of the coordinates of crosshairs on a CCD matrix is estimated and shown to be on the order of 1 nm.
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REFERENCE
R. Geckeler et al., SPIE, 4401, 184 (2001).
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Korolev, A.N., Gartsuev, A.I. Precision of Measurement of the Coordinates of an Image on a CCD Matrix. Measurement Techniques 47, 449–453 (2004). https://doi.org/10.1023/B:METE.0000038110.15049.6a
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DOI: https://doi.org/10.1023/B:METE.0000038110.15049.6a