Abstract
A method has been developed for measuring the dependence of the electron probe diameter d in a scanning electron microscope SEM on the beam current J. The relationship for the CAMSCAN CS-44 SEM is d(J) ~ J 1/4, whereas electron probe formation theory gives d(J) ~ J 3/8; the reasons for these differences are considered.
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Novikov, Y.A., Rakov, A.V. & Filippov, M.N. Beam Current Dependence of SEM Electron Probe Diameter. Measurement Techniques 47, 438–442 (2004). https://doi.org/10.1023/B:METE.0000038108.67246.68
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DOI: https://doi.org/10.1023/B:METE.0000038108.67246.68