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New Method of Testing Vacuum Gauges

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Measurement Techniques Aims and scope

Abstract

A new original method for testing vacuum gauges is presented. It consists of two stages: in the first stage gas is continuously fed into a measurement chamber and in the second stage it is pumped out (in the same pressure range). By simultaneously solving the equations describing both stages, errors caused by secondary gasdynamic processes are eliminated and there is an increase in the overall accuracy of the testing.

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Authors
  1. V. V. Kuz'min
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Kuz'min, V.V. New Method of Testing Vacuum Gauges. Measurement Techniques 47, 240–243 (2004). https://doi.org/10.1023/B:METE.0000029865.80109.64

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  • DOI: https://doi.org/10.1023/B:METE.0000029865.80109.64

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