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Preparation of New Photosensitive ZrO2 Gel Films Using Hydroxyl-Substituted Aromatic Ketones as Chemical Modification Reagents and their Patterning

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Abstract

ZrO2 gel films were prepared from zirconium tetra-n-butoxide chemically modified with one of hydroxyl-substituted aromatic ketones and 1′-hydroxy-2′-acetonaphthone, by the sol-gel method. The obtained gel film showed an absorption band, characteristic of the π-π* transition of chelate ring, at around 410 nm. The band was shifted to longer wavelength region than those for the gel films using β-diketones. The reason is thought that the hydroxyl-substituted aromatic ketone has π-electron system to form the condensed chelate ring. The absorption band associated with the chelate ring gradually decreased in intensity with UV-irradiation using a high pressure mercury lamp. This indicates that the chelate ring dissociates by the UV-irradiation and that the gel film exhibits photosensitivity. Utilizing the photosensitivity, fine patterns (about 1 μm) could be fabricated by UV-irradiation through a mask and leaching.

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References

  1. J.C. Debsikdar, J. Non-Cryst. Solids 86, 231 (1986).

    Google Scholar 

  2. C. Sanchez, J. Livage, M. Henry, and F. Babonneau, J. Non-Cryst. Solids 100,65(1988).

    Google Scholar 

  3. K. Yamada, T.Y. Chow, T. Horihata, and M. Nagata, J. Non-Cryst. Solids 100, 316 (1988).

    Google Scholar 

  4. H. Uchihashi, N. Tohge, and T. Minami, J. Ceram. Soc. Jpn. (Seramikkusu Ronbunshi) 97, 396 (1989).

    Google Scholar 

  5. F. Babonneau, L. Coury, and J. Livage, J. Non-Cryst. Solids 121, 153 (1990).

    Google Scholar 

  6. N. Tohge, K. Shinmou, and T. Minami, J. Sol-Gel Sci. Technol. 2, 581 (1994).

    Google Scholar 

  7. K. Shinmou, N. Tohge, and T. Minami, Jpn. J. Appl. Phys. 33, L1181 (1994).

    Google Scholar 

  8. G. Zhao and N. Tohge, J. Ceram. Soc. Japan., Int. Ed. 103, 1279 (1995).

    Google Scholar 

  9. G. Zhao and N. Tohge, J. Ceram. Soc. Japan., Int. Ed. 106, 106 (1998).

    Google Scholar 

  10. G. Zhao and N. Tohge, Mater. Res. Bull. 33,21(1998).

    Google Scholar 

  11. N. Tohge and Y. Takama, J. Mater. Sci.: Mater. Electron. 10, 273 (1999).

    Google Scholar 

  12. G. Zhao, N. Tohge, and J. Nishii, Jpn. J. Appl. Phys. 37, 1842 (1998).

    Google Scholar 

  13. N. Tohge, G. Zhao, and F. Chiba, Thin Solid Films 351,85 (1999).

    Google Scholar 

  14. K. Kintaka, J. Nishii, and N. Tohge, Appl. Opt. 39, 489 (2000).

    Google Scholar 

  15. N. Tohge, R. Ueno, F. Chiba, K. Kintaka, and J. Nishii, J. Sol-Gel Sci. Technol. 19, 119 (2000).

    Google Scholar 

  16. J. Nishii, K. Kintaka, N. Tohge, N. Noma, M. Hasegawa, A. Mizutani, and H. Kikuta, Jpn. J. Appl. Phys. 41, 5210 (2002).

    Google Scholar 

  17. N. Tohge, M. Hasegawa, N. Noma, K. Kintaka, and J. Nishii, J. Sol-Gel Sci. Technol. 26, 903 (2003).

    Google Scholar 

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Authors and Affiliations

  1. Department of Applied Chemistry, Kinki University, 3-4-1, Kowakae, Higashi-Osaka, Osaka, 577-8502, Japan

    Naoki Noma, Saori Yamazaki & Noboru Tohge

Authors
  1. Naoki Noma
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  2. Saori Yamazaki
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  3. Noboru Tohge
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Noma, N., Yamazaki, S. & Tohge, N. Preparation of New Photosensitive ZrO2 Gel Films Using Hydroxyl-Substituted Aromatic Ketones as Chemical Modification Reagents and their Patterning. Journal of Sol-Gel Science and Technology 31, 253–256 (2004). https://doi.org/10.1023/B:JSST.0000047998.79472.40

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  • DOI: https://doi.org/10.1023/B:JSST.0000047998.79472.40

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