Skip to main content
SpringerLink
Log in

Mass Transfer and Trapping of the Impurity Component in Deposition from the Gas Phase

  • Published:
Journal of Engineering Physics and Thermophysics Aims and scope

Abstract

The problem of removal of an impurity from a volume in the case of trapping of the impurity molecules by aerosol particles is investigated theoretically.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

REFERENCES

  1. V. E. Minaichev, Vacuum Cryopumps[in Russian], Moscow (1978).

  2. V. V. Levdanskii, Inzh.-Fiz. Zh., 37, No. 4, 602-608 (1979).

    Google Scholar 

  3. V. V. Levdanskii (Levdansky), J. Aerosol Sci., 29, Suppl., 383-384 (1998).

    Google Scholar 

  4. V. V. Levdanskii (Levdansky), J. Smolik, and P. Moravec, Int. J. Heat Mass Transfer, 43, 629-637 (2000).

    Google Scholar 

  5. S. Stefanov, A. Frezzotti, V. Levdanskii (Levdansky), V. Leitsina, and N. Pavlyukevich, Int. J. Heat Mass Transfer, 42, 2063-2069 (1999).

    Google Scholar 

  6. D. C. Skouby and K. F. Jensen, J. Appl. Phys., 63, 198-206 (1988).

    Google Scholar 

  7. T. H. Baum and P. B. Comita, Thin Solid Films, 218, 80-94 (1992).

    Google Scholar 

  8. V. V. Levdanskii, J. Smolik, P. Moravec, and V. Zdimal, Inzh.-Fiz. Zh., 75, No. 3, 118-121 (2002).

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. National Academy of Sciences of Belarus, A. V. Luikov Heat and Mass Transfer Institute, 15 P. Brovka Str., Minsk, 220072, Belarus

    V. V. Levdanskii

  2. Academy of Sciences of the Czech Republic, Institute of Chemical Process Fundamentals, Prague, Czech Republic

    J. Smolik & P. Moravec

Authors
  1. V. V. Levdanskii
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. J. Smolik
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. P. Moravec
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Levdanskii, V.V., Smolik, J. & Moravec, P. Mass Transfer and Trapping of the Impurity Component in Deposition from the Gas Phase. Journal of Engineering Physics and Thermophysics 76, 1055–1060 (2003). https://doi.org/10.1023/B:JOEP.0000003220.47394.a9

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/B:JOEP.0000003220.47394.a9

Keywords

Search

Navigation