Skip to main content
SpringerLink
Log in

ZnO thin film sensors for detecting dimethyl- and trimethyl-amine vapors

  • Published:
Journal of Materials Science: Materials in Electronics Aims and scope Submit manuscript

Abstract

Undoped and Al-doped ZnO thin films were deposited on quartz substrates using an indigenously developed modified chemical vapor deposition technique. Microstructures of the deposited films were optimized by adjusting various growth parameters. The baseline resistance of the ZnO film sensors was stabilized by annealing the as-deposited films periodically in an oxidizing and reducing ambient at maximum operating temperature. The sensor parameters were studied by exposing the optimized ZnO thin films to low concentrations of dimethylamine (DMA) and trimethylamine (TMA), the chemical species released from harvested fish and other seafood with ageing. The effect of operating temperature was found to play a vital role in determining the sensitivity and resolution of the sensor. While the undoped ZnO film surface, sensitized with palladium, exhibited higher DMA sensitivity than that of TMA, an enhanced TMA sensitivity was noticed with the ZnO films doped with aluminum.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. G. A. Hirata, J. M. Siqueiros, J. A. Diaz, O. Contreras, J. Mckittrick, T. Cheeks and O. A. Lopez, Thin Solid Films 288 (1996) 29.

    Google Scholar 

  2. J. G. E. Gardeniers, Z. M. Rittersma and G. J. Burger J. Appl. Phys. 83 (1988) 7844.

    Google Scholar 

  3. J. Han, A. M. R. Senos and P. Q. Mantas, J. Eur. Ceram. Soc. 22 (2002) 1653.

    Google Scholar 

  4. J. B. Lee, H. J. Lee, S. H. Seo and J. S. Park, Thin Solid Films 398–399 (2001) 641.

    Google Scholar 

  5. S. Basu and A. Dutta, Sens. Actuators B 22 (1994) 83.

    Google Scholar 

  6. H. Nanto, H. Sokooshi and T. Usuda, ibid. 10 (1993) 79.

    Google Scholar 

  7. Y. Takao, M. Nakanishi, T. Kawaguchi, Y. Shimizu and M. Egashira, ibid. 24–25 (1995) 375.

    Google Scholar 

  8. M. Egashira, Y. Shimizu and Y. Takao, in Proceedings of the Chemical Sensors II, 1993, p. 510.

  9. R. S. Niranjan, M. S. Londhe, A. B. Mandale, S. R. Sainkar, L. S. Prabhumirashi, K. Vijayamohanan and I. S. Mulla Sens. Actuators B 87 (2002) 406.

    Google Scholar 

  10. S. Basu, T. K. Chaudhuri and A. Dutta, Mater. Sci. Eng. B 14 (1992) 31.

    Google Scholar 

  11. H. H. Afify, S. A. Nasser and S. E. Demian, J. Mater. Sci. 2 (1991) 152.

    Google Scholar 

  12. M. Katsura, M. Shiratori, T. Takahasi, Y. Yokomizo and N. Ichinose, in Chemical Sensors, edited by T. Seiyama (Kodanasa, Tokyo, 1983) p. 101.

    Google Scholar 

  13. Z. Zhaochun, H. Baibiao, Y. Yongqin and C. Deliang, Mater. Sci. Eng. B 86 (2001) 109.

    Google Scholar 

  14. V. A. Chaudhary, I. S. Mulla and K. Vijayamohanan, J. Mater. Sci. Lett. 16 (1997) 1819.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Materials Science Centre, Indian Institute of Technology, Kharagpur, 721302, India

    S. Roy & S. Basu

Authors
  1. S. Roy
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. S. Basu
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Roy, S., Basu, S. ZnO thin film sensors for detecting dimethyl- and trimethyl-amine vapors. Journal of Materials Science: Materials in Electronics 15, 321–326 (2004). https://doi.org/10.1023/B:JMSE.0000024234.49920.7b

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/B:JMSE.0000024234.49920.7b

Keywords

Search

Navigation