Skip to main content
Log in

Properties of transparent conducting ZnO : Al oxide thin films and their application for molecular organic light-emitting diodes

  • Published:
Journal of Materials Science: Materials in Electronics Aims and scope Submit manuscript

Abstract

ZnO : Al (ZAO) films were deposited on glass substrates by a reactive mid-frequency sputtering system. The microstructural, electrical, and optical properties of ZAO films were investigated. It was observed that the polycrystalline film was (0 0 2n) textured with columnar structure. The minimum resistivity was 1.39×10−4 Ω cm with a carrier concentration of 1.58×1021 cm−3 and a Hall mobility of 28.2 cm2 V−1 s−1, correspondingly with the c-axis nearly equal to the value of ZnO powder and the minimum mechanical stress therein. The average transmittance of 80.8% in the visible range and infrared reflectance of over 86% in the 1600–4400 cm−1 interval were obtained. The ZAO films were used as the transparent anodes to fabricate light-emitting diodes, and a luminance efficiency of 2.09 cd A−1 was measured at a current density of 5.38 A m−2.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. B. G. Lewis and D. C. Paine, MRS Bull. 25 (2000) 22.

    Google Scholar 

  2. M. Chen, Z. L. Pei, X. Wang, Y. H. Yu, X. H. Liu, C. Sun and L. S. Wen, J. Phys. D. Appl. Phys. 33 (2000) 2538.

    Google Scholar 

  3. J. R. Sheats, H. Antoniadis, M. Hueschen, W. Lenonare, J. Miller, R. Moon, D. Roitman and A. Stocking, Science 273 (1996) 884.

    Google Scholar 

  4. Z. B. Deng, X. M. Ding, S. T. Lee and W. A. Gambling, Appl. Phys. Lett. 74 (1999) 2227.

    Google Scholar 

  5. A. V. Singh, R. M. Mehra, N. Buthrath, A. Wakahara and A. Yoshida, J. Appl. Phys. 90 (2001) 5661.

    Google Scholar 

  6. G. S. Park and J. K. Kwon, J. Mater. Sci.: Mater. Electron. 12 (2001) 497.

    Google Scholar 

  7. X. Jiang, C. L. Jia and B. Szyszka, Appl. Phys. Lett. 80 (2002) 3090.

    Google Scholar 

  8. J. Kido and Y. Lizumi, ibid. 73 (1998) 2721.

    Google Scholar 

  9. Y. Shirota, Y. Kuwabara, H. Inada, T. Wakimoto, H. Nakada, Y. Yonemoto, S. Kawami and K. Imai, ibid. 65 (1994) 807.

    Google Scholar 

  10. S.A. VANSLYKE, C. H. Chen and c. w. Tang, ibid. 69 (1996) 2160.

    Google Scholar 

  11. J. Harloff, in "A Thesis to the Faculty of Engineering And Applied Science of the University of Pennsylvania" (Pennsylvania University, 1995) p. 8.

  12. N. Fujimura, T. Nishihara, S. Goto, J. F. Xu and T. Ito, J. Cryst. Growth 130 (1993) 269.

    Google Scholar 

  13. K. Tominaga, T. Sueyoshi, C. Munfei and Y. Shintani, Jpn. J. Appl. Phys. 32 (1993) 4131.

    Google Scholar 

  14. Z. L. Pei, C. Sun, M. H. Tan, J. Q. Xiao, D. H. Guan, R. F. Huang and L. S. Wen, J. Appl. Phys. 90 (2001) 3432.

    Google Scholar 

  15. H. Kim, A. Pique, J. S. Horwitz, H. Murata, Z. H. KAFAFI, C. M. Gilmore and D. B. Chrisey, Thin Solid Films 377-378 (2000) 798.

  16. M. Chen, Z. L. Pei, X. Wang, C. Sun and L. S. Wen, J. Vac. Sci. Technol. A 19 (2001) 963.

    Google Scholar 

  17. J. A. Thornton and D. W. Hoffman, Thin Solid Films 171 (1989) 5.

    Google Scholar 

  18. R. Cebulla, R. Wendt and K. Ellmer, J. Appl. Phys. 83(1998) 1087.

    Google Scholar 

  19. J. A. Thornton, J. Vac. Sci. Technol. A 4 (1986) 3059.

    Google Scholar 

  20. J. A. Thornton, ibid. 11 (1974) 666.

    Google Scholar 

  21. D. C. Look, Mater. Sci. Eng. B 80 (2001) 383.

    Google Scholar 

  22. E. Burstein, Phys. Rev. 93 (1954) 632.

    Google Scholar 

  23. A. P. Ruth, J. B. Webb and D. F. Williams, Phys. Rev. B 25 (1982) 7836.

    Google Scholar 

  24. z. C. Jin, I. Hamberg and C. G. Granqvist, J. Appl. Phys. 64 (1988) 5117.

    Google Scholar 

  25. Y. Qu, T. A. Gessert, K. Ramanathan, R. G. Dhere, R. Noufi and T. J. Coutts, J. Vac. Sci. Technol. A 11 (1993) 996.

    Google Scholar 

  26. S. M. Tadayyon, K. Griffiths, P. R. Norton, C. Tripp and Z. Popovic, ibid. 17 (1999) 1773.

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Cao, H.T., Sun, C., Pei, Z.L. et al. Properties of transparent conducting ZnO : Al oxide thin films and their application for molecular organic light-emitting diodes. Journal of Materials Science: Materials in Electronics 15, 169–174 (2004). https://doi.org/10.1023/B:JMSE.0000011357.32981.47

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/B:JMSE.0000011357.32981.47

Keywords

Navigation