Abstract
ZnO : Al (ZAO) films were deposited on glass substrates by a reactive mid-frequency sputtering system. The microstructural, electrical, and optical properties of ZAO films were investigated. It was observed that the polycrystalline film was (0 0 2n) textured with columnar structure. The minimum resistivity was 1.39×10−4 Ω cm with a carrier concentration of 1.58×1021 cm−3 and a Hall mobility of 28.2 cm2 V−1 s−1, correspondingly with the c-axis nearly equal to the value of ZnO powder and the minimum mechanical stress therein. The average transmittance of 80.8% in the visible range and infrared reflectance of over 86% in the 1600–4400 cm−1 interval were obtained. The ZAO films were used as the transparent anodes to fabricate light-emitting diodes, and a luminance efficiency of 2.09 cd A−1 was measured at a current density of 5.38 A m−2.
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Cao, H.T., Sun, C., Pei, Z.L. et al. Properties of transparent conducting ZnO : Al oxide thin films and their application for molecular organic light-emitting diodes. Journal of Materials Science: Materials in Electronics 15, 169–174 (2004). https://doi.org/10.1023/B:JMSE.0000011357.32981.47
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DOI: https://doi.org/10.1023/B:JMSE.0000011357.32981.47