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Study of polymer humidity sensor array on silicon wafer

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Authors and Affiliations

  1. Department of Electronic Engineering, Dalian University of Technology, Dalian, 116023, People's Republic of China

    Jing Wang, Kaihe Shi & Xiaojun Zhang

  2. School of Electronic Science and Engineering, Jilin University, Changchun, 130023, People's Republic of China

    Lihua Chen

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  1. Jing Wang
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  2. Kaihe Shi
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  3. Lihua Chen
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  4. Xiaojun Zhang
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Wang, J., Shi, K., Chen, L. et al. Study of polymer humidity sensor array on silicon wafer. Journal of Materials Science 39, 3155–3157 (2004). https://doi.org/10.1023/B:JMSC.0000025847.52357.b8

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  • DOI: https://doi.org/10.1023/B:JMSC.0000025847.52357.b8

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