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Controlling preferred orientation of ZnO thin films by atomic layer deposition

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Authors and Affiliations

  1. Basic Research Laboratory, Electronics and Telecommunications Research Institute, 161 Gajong-Dong, Yusong-Gu, Daejon, 305-350, Korea

    Sang-Hee Ko Park

  2. Display Device Center, Device Solution Network, Samsung Electronics Co., Ltd., Cheonan-City, Chungcheongnam-Do, 330-300, Korea

    Yong Eui Lee

Authors
  1. Sang-Hee Ko Park
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  2. Yong Eui Lee
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Ko Park, SH., Lee, Y.E. Controlling preferred orientation of ZnO thin films by atomic layer deposition. Journal of Materials Science 39, 2195–2197 (2004). https://doi.org/10.1023/B:JMSC.0000017786.81842.ae

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  • DOI: https://doi.org/10.1023/B:JMSC.0000017786.81842.ae

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