Skip to main content
Log in

Growth of CdSe- and CdTe-Based Nanostructures on Silicon

  • Published:
Inorganic Materials Aims and scope

Abstract

CdSe, CdTe, and CdTe x Se1 – x nanostructures were grown on silicon substrates with different orientations by atomic layer deposition. The general mechanisms of Cd, Se, and Te chemisorption and nanostructure growth were elucidated, and the conditions for layer-by-layer growth were identified.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

REFERENCES

  1. Suntola, T., Atomic Layer Epitaxy, Mater. Sci. Rep., 1989, vol. 4, no. 7, pp. 261–312.

  2. Ezhovskii, Yu.K. and Murashev, S.V., Structural Evolution of Cadmium Chalcogenide Films Prepared by Molecular Beam Techniques, Zh. Prikl. Khim. (S.-Peterburg), 1992, vol. 65, no. 10, pp. 2217–2220.

    Google Scholar 

  3. Seidel, T., Londergan, A., and Winkler, L., Progress and Opportunities in Atomic Layer Deposition, Solid State Technol., 2003, no. 5, pp. 67–71.

    Google Scholar 

  4. Nishizava, J. and Kurabayash, T., Latest Molecular Layer Epitaxy Technology, Chem. Sustainable Dev., 2000, no. 8, pp. 5–12.

    Google Scholar 

  5. Gelatos, J., Shen, L., Chung, H., and Thakur, R., ALD for Sub-90 nm Device Node Barriers, Contacts, and Capacitors, Solid State Technol., 2003, vol. 2, pp. 44–48.

    Google Scholar 

  6. Aleskovskii, V.B., Stekhiometriya i sintez tverdykh soedinenii (Stoichiometry and Synthesis of Solid Compounds), Leningrad: Nauka, 1976.

    Google Scholar 

  7. Ezhovskii, Yu.K. and Vainshtein, P.M., Activity of Hydroxyl Groups on the Surface of Single-Crystal Silicon, Zh. Fiz. Khim., 1997, vol. 71, no. 12, pp. 2222–2226.

    Google Scholar 

  8. Handbook of Thin Film Technology, Maissel, L.I. and Glang, R., Eds., New York: McGraw-Hill, 1970. Translated under the title Tekhnologiya tonkikh plenok: Spravochnik, Moscow: Sovetskoe Radio, 1977, vol. 1, pp. 45–47.

    Google Scholar 

  9. Nesmeyanov, A.N., Davlenie para khimicheskikh elementov (Vapor Pressures of Chemical Elements), Moscow: Akad. Nauk SSSR, 1961.

    Google Scholar 

  10. Osnovy ellipsometrii (Principles of Ellipsometry), Rzhanov, V.K., Ed., Novosibirsk: Nauka, 1979.

    Google Scholar 

  11. Nefedov, V.I. Rentgenoelektronnaya spektroskopiya khimicheskikh soedinenii (X-ray Photoelectron Spectroscopy of Chemical Compounds), Moscow: Khimiya, 1984.

    Google Scholar 

  12. Handbook of X-ray Photoelectron Spectroscopy, Muilenberg, G.E., Ed., Eden Prairie: Physical Electronics Division, Perkin-Elmer Corp., 1978.

    Google Scholar 

  13. Nefedov, V.I. and Cherepin, V.T., Fizicheskie metody issledovaniya poverkhnosti tverdykh tel (Physical Characterization of Solid Surfaces), Moscow: Nauka, 1983.

    Google Scholar 

  14. Kiselev, V.F. and Krylov, O.V., Adsorbtsionnye protsessy na poverkhnosti poluprovodnikov i dielektrikov (Adsorption Processes on Semiconductor and Insulator Surfaces), Moscow: Nauka, 1978.

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Ezhovskii, Y.K., Mikhaevich, D.P. Growth of CdSe- and CdTe-Based Nanostructures on Silicon. Inorganic Materials 40, 909–913 (2004). https://doi.org/10.1023/B:INMA.0000041319.30903.c9

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/B:INMA.0000041319.30903.c9

Keywords

Navigation