Abstract
High-purity isotopically enriched (99.98% 28Si, 99.57% 29Si, and 99.83% 30Si) silane samples are prepared for the first time. The total hydrocarbon content of the samples is no higher than 0.1–0.3 ppm. The concentration of electroactive impurities in the silicon prepared from the purified monoisotopic silane is below 1015 cm–3.
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Bulanov, A.D., Moiseev, A.N., Troshin, O.Y. et al. Fine Purification of Monoisotopic Silanes 28SiH4 , 29SiH4 , and 30SiH4 via Distillation. Inorganic Materials 40, 555–557 (2004). https://doi.org/10.1023/B:INMA.0000031984.83652.87
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DOI: https://doi.org/10.1023/B:INMA.0000031984.83652.87