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Atmospheric pressure atomic layer epitaxy of ZnO on a sapphire (0001) substrate by alternate reaction of ZnCl2 and O2

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Journal of Materials Science Letters

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References

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Authors and Affiliations

  1. Graduate School of Science and Engineering, Shizuoka University, 3-5-1 Johoku, Hamamatsu, 432-8561, Japan

    K. Kaiya

  2. Department of Materials Science and Technology, Faculty of Engineering, Shizuoka University, 3-5-1 Johoku, Hamamatsu, 432-8561, Japan

    N. Yoshii, N. Takahashi & T. Nakamura

Authors
  1. K. Kaiya
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  2. N. Yoshii
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  3. N. Takahashi
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  4. T. Nakamura
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Kaiya, K., Yoshii, N., Takahashi, N. et al. Atmospheric pressure atomic layer epitaxy of ZnO on a sapphire (0001) substrate by alternate reaction of ZnCl2 and O2. Journal of Materials Science Letters 19, 2089–2090 (2000). https://doi.org/10.1023/A:1026745903387

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  • DOI: https://doi.org/10.1023/A:1026745903387

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