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Effect of Monocarboxylic Acids on Synthesis of Porous Silicon

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Abstract

Electrochemical formation of deep layers of porous silicon (PS) in monocrystalline silicon of type KEF-20 in electrolytes containing formic and acetic acids is studied. It is found that the chemisorption of carboxylic acids affects electrochemical parameters of the PS formation and the microstructure of its layers. It is shown that the chemisorption and the surface-active properties of acetic acid make the microstructure of porous layers more ordered.

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REFERENCES

  1. Bomchil, G., Herino, R., Barla, K., et al., Ann. Chim. (Paris), 1983, vol. 8, p. 41.

    Google Scholar 

  2. Labunov, V., Bondarenko, V., Glinenko, L., et al., Thin Solid Fimls, 1986, vol. 137, p. 123.

    Google Scholar 

  3. Hamilton, B., Semicond. Sci. Technol., 1995, vol. 10, p. 1187.

    Google Scholar 

  4. Frye, R.C., Nat. Res. Symp. Proc., 1984, vol. 33, p. 53.

    Google Scholar 

  5. Kovalevskii, A.A., Baranov, I.L., and Snitovskii, Yu.P., Mikroelektronika, 1996, vol. 25, p. 298.

    Google Scholar 

  6. Baranov, I.L., Stanovaya, L.S., Tabulina, L.V., et al., Elektrokhimiya, 1998, vol. 34, p. 588.

    Google Scholar 

  7. Baranov, I.L., Tabulina, L.V., Stanovaya, L.S., et al., Zh. Prikl. Khim. (St. Petersburg), 1998, vol. 71, p. 1813.

    Google Scholar 

  8. Izidinov, S.O., Blokhina, A.P., and Ismailova, L.A., Elektrokhimiya, 1987, vol. 23, p. 1545.

    Google Scholar 

  9. Gavrilov, S.A., Zavaritskaya, T.N., Karavanskii, V.A., et al., Elektrokhimiya, 1997, vol. 33, p. 1064.

    Google Scholar 

  10. Buchin, E.Yu., Postnikov, A.V., Prokaznikov, A.V., et al., Pis'ma Zh. Eksp. Teor. Fiz., 1995, vol. 21, p. 60.

    Google Scholar 

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Authors and Affiliations

  1. Belarussian State University of Information Science and Radio Engineering, ul. Brovki 17, Minsk, 220072, Belarus

    I. L. Baranov, L. V. Tabulina, L. S. Stanovaya & A. A. Kovalevskii

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  1. I. L. Baranov
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  2. L. V. Tabulina
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  3. L. S. Stanovaya
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  4. A. A. Kovalevskii
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Baranov, I.L., Tabulina, L.V., Stanovaya, L.S. et al. Effect of Monocarboxylic Acids on Synthesis of Porous Silicon. Russian Journal of Electrochemistry 36, 1338–1340 (2000). https://doi.org/10.1023/A:1026624319032

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  • DOI: https://doi.org/10.1023/A:1026624319032

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