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Gas Sensing Property of SnO2 Sputtered Films Deposited Under Different Conditions

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Faculty of Engineering, Toyama University, Gofuku 3190, Toyama, 930, Japan

    T. Yamazaki, T. Shimazaki, K. Tereyama & N. Nakatani

  2. Faculty of Science, Assuit University, Assuit, Egypt

    G. A. Mohamed

Authors
  1. T. Yamazaki
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  2. T. Shimazaki
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  3. K. Tereyama
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  4. N. Nakatani
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  5. G. A. Mohamed
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Yamazaki, T., Shimazaki, T., Tereyama, K. et al. Gas Sensing Property of SnO2 Sputtered Films Deposited Under Different Conditions. Journal of Materials Science Letters 17, 891–894 (1998). https://doi.org/10.1023/A:1026435816778

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  • DOI: https://doi.org/10.1023/A:1026435816778

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