Abstract
This paper presents an empirical approach to the modeling of fatigue in silicon MEMS structures. The approach is based on the regression analysis of stress-life data obtained from prior fatigue experiments on polysilicon and single crystal silicon. The possible directions for future modeling efforts are identified at the end of the paper, following a discussion on the implications of the current model fatigue life prediction.
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Bhalerao, K., Soboyejo, A.B.O. & Soboyejo, W.O. Modeling of fatigue in polysilicon MEMS structures. Journal of Materials Science 38, 4157–4161 (2003). https://doi.org/10.1023/A:1026329606103
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DOI: https://doi.org/10.1023/A:1026329606103