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Preparation and humidity-sensing properties of nanostructured potassium tantalate thin films

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Abstract

Nanostructured potassium tantalate (KT) thin films are prepared using a sol–gel process and the humidity-sensing behaviors of the films are investigated. The films possessed nano-sized grains and nanoporous structure. The KT film annealed at 500 °C showed high humidity sensitivity with nearly three orders change in the resistance during the relative humidity variation from 20% to 90%. The humidity-sensing behaviors of the thin films with annealing temperature are discussed.

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Authors and Affiliations

  1. Institute of Advanced Materials, Inha University, Yonghyun-dong, Nam-ku, Inchon, 402-751, South Korea

    Weon-Pil Tai & Jun-Gyu Kim

  2. School of Materials Science and Engineering, Inha University, Yonghyun-dong, Nam-ku, Inchon, 402-751, South Korea

    Jae-Hee Oh & Chongmu Lee

  3. School of Chemical Engineering and Biotechnology, Inha University, Yonghyun-dong, Nam-Ku, Inchon, 402-751, South Korea

    Dong-Wha Park & Wha-Seung Ahn

Authors
  1. Weon-Pil Tai
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  2. Jun-Gyu Kim
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  3. Jae-Hee Oh
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  4. Chongmu Lee
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  5. Dong-Wha Park
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  6. Wha-Seung Ahn
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Tai, WP., Kim, JG., Oh, JH. et al. Preparation and humidity-sensing properties of nanostructured potassium tantalate thin films. Journal of Materials Science: Materials in Electronics 15, 25–28 (2004). https://doi.org/10.1023/A:1026232702889

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