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The impact of the structural dimensions and optical properties of bulk material on the optical performance of diffraction microstructures: crystalline silicon gratings and applications

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Abstract

This paper examines the impact of the structural dimensions and optical properties of the bulk material on the optical performance of gratings and microstructures. We present a brief summary of a rigorous electromagnetic diffraction analysis, and the S-matrix propagation algorithm we have developed. Infrared spectral transmission measurements in the range 2.5–25 μm, along with a rigorous full-vector simulation, are presented. Good agreement between theory and experiment is obtained. The optical performances of various optical devices incorporating grating structures are presented. Such devices include narrow-band filters and polarizers, and three-dimensional photonics band-gap structures.

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Authors and Affiliations

  1. Department of Electrical and Computer Engineering, Ben-Gurion University of Negev, Beer-Sheva, 84105, Israel

    S. Hava

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  1. S. Hava
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Hava, S. The impact of the structural dimensions and optical properties of bulk material on the optical performance of diffraction microstructures: crystalline silicon gratings and applications. Journal of Materials Science: Materials in Electronics 14, 641–644 (2003). https://doi.org/10.1023/A:1026194029837

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  • DOI: https://doi.org/10.1023/A:1026194029837

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