Abstract
The possibilities of excimer laser processing for increasing the specific surface area of sol–gel ZrO2 thin films for catalytic applications are studied. It is established that as a result of laser irradiation, the film microstructure is strongly modified, and a high specific surface area is obtained. Simultaneously, the as-deposited amorphous films undergo a phase transition to the high temperature cubic zirconia modification, c-ZrO2. The excimer laser modified surface is found to yield high efficiency in promoting the electroless plating of copper, and this is very encouraging for further catalytic applications of thin sol–gel zirconia films.
Similar content being viewed by others
References
D. H. Aguilar, L. C. Torres-Gonzalez, L. M. Torres-Martinez, T. Lopez and P. Quintana, J. Solid State Chem. 158 (2000) 349.
R. Rujkorakarn and J. R. Sites, J. Vac. Sci. Technol. A 4 (1986) 568.
K. Starbova, V. Mankov, N. Starbov, D. Popov, D. Nihtianova, K. Kolev and L. D. Laude, Appl. Surf. Sci. 173 (2001) 177.
M. J. Paterson, P. J. K. Paterson and B. Ben-Nissan, J. Mater. Res. 13 (1988) 388.
A. L. Kljachko-Gurvich, Izv. ANSSSR Otd. Chim. Nauk 10 (1961) 1884 (in Russian).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Krumov, E., Dikova, J., Starbova, K. et al. Thin ZrO2 sol–gel films for catalytic applications. Journal of Materials Science: Materials in Electronics 14, 759–760 (2003). https://doi.org/10.1023/A:1026176431171
Issue Date:
DOI: https://doi.org/10.1023/A:1026176431171