Abstract
Experimental study of the distribution of local rates of electrochemical micromachining in the presence of photoresist masks in various hydrodynamic conditions (macroscopically nonuniform rotating disk electrode, sprayer flow, an electrode placed into a cell with chaotic bulk electrolyte mixing) shows that the maximum etching localization is achieved at the control of the dissolution rate by the mass transport rate (at achieving the anodic limiting current). The localization enhancement as compared to the primary current distribution takes place in the case of a turbulent flow at hydrodynamic conditions where the removal of dissolution products from the undercutting region is hindered. These conditions (electrochemical reaction limited by the ion mass transport rate, high resistance to the mass transport in the undercutting region) are necessary for the localization enhancement using a pulsed anodic–cathodic treatment.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Datta, M. and Romankiw, L.T., J. Electrochem. Soc., 1989, vol. 136, p. 285C.
West, A.C., Madore, Ch., Matlosz, M., and Landolt, D., J. Electrochem. Soc., 1992, vol. 139, p. 499.
Kwon, G.-J., Sun, H.-Y., and Sohn, H.-J., J. Electrochem. Soc., 1995, vol. 142, p. 3016.
Shenoy, R.V., Datta, M., and Romankiw, L.T., J. Electrochem. Soc., 1996, vol. 143, p. 2305.
Shenoy, R.V. and Datta, M., J. Electrochem. Soc., 1996, vol. 143, p. 544.
Dikusar, A.I., Keloglu, O.Yu., and Yushchenko, S.P., Elektrokhimiya, 1999, vol. 35, p. 724.
Dikusar, A.I., Keloglu, O.Yu., and Yushchenko, S.P., Elektrokhimiya, 1999, vol. 35, p. 730.
Alkire, R. and Deligianni, H., J. Electrochem. Soc., 1988, vol. 135, p. 1093.
Alkire, R., Deligianni, H., and Ju, J.-B., J. Electrochem. Soc., 1990, vol. 137, p. 818.
Georgiadou, M., Mohr, R., and Alkire, R.C., J. Electrochem. Soc., 2000, vol. 147, p. 3021.
West, A.C. and Newman, J., J. Electrochem. Soc., 1991, vol. 138, p. 1620.
Dinan, T.E., Matlosz, M., and Landolt, D., J. Electrochem. Soc., 1991, vol. 138, p. 2947.
Dikusar, A.I., Mustyatse, A.N., and Yushchenko, S.P., Elektrokhimiya, 1997, vol. 33, p. 163.
Kuo, H.C. and Landolt, D., Electrochim. Acta, 1975, vol. 20, p. 393.
Davydov, A.D., Kabanov, B.N., Kashcheev, V.D., Mirzoev, R.A., and Nenashev, V.A., Fiz. Khim. Obrab. Mater., 1972, no. 4, p. 139.
Filinovskii, V.Yu., Itogi Nauki Tekh., Ser.: Elektrokhim., 1989, vol. 29, p. 3.
Chin, D.-T. and Chandran, R.R., J. Electrochem. Soc., 1981, vol. 128, p. 1904.
Davydov, A.D., Itogi Nauki Tekh., Ser.: Elektrokhim., 1989, vol. 29, p. 38.
Dikusar, A.I., Redkozubova, O.O., Yushchenko, S.P., Kriksunov, L.B., and Kharris, D., Elektron. Obrab. Mater., 2002, no. 5, p. 4.
Bardin, M.B., Dikusar, A.I., and Kishinevskii, M.Kh., Elektrokhimiya, 1970, vol. 6, p. 212.
Grafov, B.M., Martem'yanov, S.A., and Nekrasov, L.N., Turbulentnyi diffuzionnyi sloi v elektrokhimicheskikh sistemakh (The Turbulent Diffusion Layer in Electrochemical Systems), Moscow: Nauka, 1990.
Dikusar, A.I. and Mustyatse, A.N., Elektrokhimiya, 1994, vol. 30, p. 483.
Redkozubova, O.O., Keloglu, O.Yu., Yushchenko, S.P., and Dikusar, A.I., Elektron. Obrab. Mater., 1999, no. 5, p. 4.
Dikusar, A.I., Redcozubova, O.O., Yuschenko, S.P., Kriksunov, L., and Harris, D., Abstracts of Papers, 53 Ann. Meet. of ISE, Düsseldorf, 2002, p. 213.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Dikusar, A.I., Redkozubova, O.O., Yushchenko, S.P. et al. Role of Hydrodynamic Conditions in the Distribution of Anodic Dissolution Rates in Cavity Etching Regions during Electrochemical Micromachining of Partially Insulated Surfaces. Russian Journal of Electrochemistry 39, 1073–1077 (2003). https://doi.org/10.1023/A:1026167219224
Issue Date:
DOI: https://doi.org/10.1023/A:1026167219224