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Photoconductivity spectroscopy in hydrogenated microcrystalline silicon thin films

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Abstract

Steady-state photoconductivity and sub-bandgap absorption measurements by the dual-beam photoconductivity (DBP) method were carried out on undoped hydrogenated microcrystalline silicon thin films prepared by VHF-PECVD and hot-wire chemical vapor deposition. The results are compared with those of the constant-photocurrent method (CPM) and photothermal deflection spectroscopy (PDS). It is found that DBP, CPM, and PDS provide complementary data on the optoelectronic processes in microcrystalline silicon.

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Güneş, M., Akdaş, D., Göktaş, O. et al. Photoconductivity spectroscopy in hydrogenated microcrystalline silicon thin films. Journal of Materials Science: Materials in Electronics 14, 729–730 (2003). https://doi.org/10.1023/A:1026147624811

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  • DOI: https://doi.org/10.1023/A:1026147624811

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