Skip to main content
SpringerLink
Log in

Study of the surfaces of CVD-WO3 films, by atomic force microscopy and spectroscopic ellipsometry

  • Published:
Journal of Materials Science: Materials in Electronics Aims and scope Submit manuscript

Abstract

Atomic force microscopy imaging of chemical vapor deposition WO3 films reveals the presence of domed crystallites that resemble the florets of cauliflowers with a rough surface texture. Annealing at 400 °C and above leads to further surface roughening, with estimated root mean square roughness values of 40–50 nm. Spectroscopic ellipsometry analysis shows that the surface layer becomes thicker with increasing oxygen flow rate during film deposition. This layer is predominantly amorphous for as-deposited films, and predominantly crystalline after annealing.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. S. K. Deb, Philos. Mag. 27 (1973) 801.

    Google Scholar 

  2. D. Green, Appl. Opt. 29 (1990) 4547.

    Google Scholar 

  3. D. Davazoglou and A. Donnadieu, Thin Solid Films 147 (1987) 131.

    Google Scholar 

  4. K. Gesheva, G. Stoyanov and D. Gogova, Mater. Res. Soc. Symp. Proc. 415 (1996) 155.

    Google Scholar 

  5. A. Szekeres, D. Gogova and K. Gesheva, J. Cryst. Growth 198–199 (1999) 1235.

    Google Scholar 

  6. J. F. Owen, K. J. Teegarden and H. R. Shanks, Phys. Rev B 18 (1978) 3827.

    Google Scholar 

  7. A. Szekeres and D. Gogova, Proc. of SPIE 3573 (1998) 200.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Chemical Engineering, Yale University, PO Box 208286, New Haven, CT, 06520-8286, USA

    R. E. Tanner

  2. Institute of Solid State Physics, 72, Tzarigradsko Chaussee, 1784, Sofia, Bulgaria

    A. Szekeres

  3. Central Laboratory of Solar Energy and New Energy Sources, Tzarigradsko Chaussee 72, 1784, Sofia, Bulgaria

    D. Gogova & K. Gesheva

Authors
  1. R. E. Tanner
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. Szekeres
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. D. Gogova
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. K. Gesheva
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Tanner, R.E., Szekeres, A., Gogova, D. et al. Study of the surfaces of CVD-WO3 films, by atomic force microscopy and spectroscopic ellipsometry. Journal of Materials Science: Materials in Electronics 14, 769–770 (2003). https://doi.org/10.1023/A:1026136717058

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/A:1026136717058

Keywords

Search

Navigation