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Growth of ZnO thin film on SiO2 substrates by the RF magnetron sputtering method

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Journal of Materials Science Letters

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Authors and Affiliations

  1. School of Material Science and Engineering, Inha University Yonghyun-dong, Nam-ku, Incheon, 402-751, Korea

    K. S. Kim, H. W. Kim & N. H. Kim

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  1. K. S. Kim
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  2. H. W. Kim
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  3. N. H. Kim
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Kim, K.S., Kim, H.W. & Kim, N.H. Growth of ZnO thin film on SiO2 substrates by the RF magnetron sputtering method. Journal of Materials Science Letters 22, 1155–1156 (2003). https://doi.org/10.1023/A:1025131212403

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