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Calculation of sputtering rate by a Monte Carlo method

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Journal of Materials Science Letters

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Authors and Affiliations

  1. School of Mechanical and Production Engineering, Nanyang Technological University, Singapore, 639798

    J. H. Hsieh & C. Li

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  1. J. H. Hsieh
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  2. C. Li
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Hsieh, J.H., Li, C. Calculation of sputtering rate by a Monte Carlo method. Journal of Materials Science Letters 22, 1125–1126 (2003). https://doi.org/10.1023/A:1025114725607

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  • DOI: https://doi.org/10.1023/A:1025114725607

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