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Plasma cleaning of carbon species for silicon homoepitaxial growth

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Journal of Materials Science Letters

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Correspondence to H. W. Kim.

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Kim, H.W., Hwang, W.S., Lee, C. et al. Plasma cleaning of carbon species for silicon homoepitaxial growth. Journal of Materials Science Letters 22, 1067–1068 (2003). https://doi.org/10.1023/A:1024974521991

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  • DOI: https://doi.org/10.1023/A:1024974521991

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