Skip to main content
SpringerLink
Log in

Nonlinear Response of a Rectangular Membrane Sensing Element

  • Published:
Russian Microelectronics Aims and scope Submit manuscript

Abstract

The problem of large deflections is solved for a pressure sensing element in the form of a fixed-edge rectangular membrane with an aspect ratio of 1, 1.5, 2, or 3. Analytical formulas are derived for the deflection, allowing for midplane deformation. A manageable model is constructed for calculating the components of strain and stress. The results are found to be in good agreement with data obtained by the finite-element method. The magnitude of stress nonlinearity is calculated as a function of coordinates for each surface of the membrane.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Subscribe and save

Springer+ Basic
$34.99 /Month
  • Get 10 units per month
  • Download Article/Chapter or eBook
  • 1 Unit = 1 Article or 1 Chapter
  • Cancel anytime
Subscribe now

Buy Now

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

REFERENCES

  1. Kovacs, J.T.A., Micromachined Transducer Sourcebook, WCB, McGraw-Hill, 1998.

    Google Scholar 

  2. Puers, R., Capacitive Sensors: When and How to Use Them, Sens. Actuators, A, 1993, vols. 37-38, pp. 93-105.

    Google Scholar 

  3. Meier-Scheider, D., Maibach, J., and Obermeier, E., Computer-Aided Characterization of the Elastic Properties of Thin Films, J. Micromech. Microeng., 1992, vol.2, pp. 173–175.

    Google Scholar 

  4. Jniazdomski, Z. and Komalski, A., Practical Approach to Extraction of Piezoresistance Coefficient, Sens. Actuators, A, 1998, vol. 68, pp. 329–332.

    Google Scholar 

  5. Pancewicz, T., Jechomicz, R., Jniazdomski, Z., Azgin,Z., and Komalski, P., The Empirical Verification of the FEM Model of Semiconductor Pressure Sensors, Sens. Actuators, A, 1999, vol. 16, pp. 260–265.

    Google Scholar 

  6. Gridchin, A.V. and Gridchin, V.A., The Four-Terminal Piezotransducer: Theory and Comparison with Piezoresistive Bridge, Sens. Actuators, A, 1997, vol. 58, pp.219–223.

    Google Scholar 

  7. Steinmann, R., Friemann, H., Prescher, C., and Schellin,R., Mechanical Behaviour of Micromachined Sensor Membranes under Uniform External Pressure Affected by In-Plane Stresses Using a Ritz Method and Hermite Polynomials, Sens. Actuators, A, 1995, vol. 48, pp. 37–46.

    Google Scholar 

  8. Timoshenko, S. and Woinowsky-Krieger, S., Theory of Plates and Shells, New York: McGraw-Hill, 1959, p.635.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Novosibirsk State Technical University, Novosibirsk, Russia

    V. A. Gridchin, V. M. Lubimsky & A. V. Shaporin

Authors
  1. V. A. Gridchin
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. V. M. Lubimsky
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. A. V. Shaporin
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Gridchin, V.A., Lubimsky, V.M. & Shaporin, A.V. Nonlinear Response of a Rectangular Membrane Sensing Element. Russian Microelectronics 32, 233–242 (2003). https://doi.org/10.1023/A:1024575515798

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/A:1024575515798

Keywords

Search

Navigation