Abstract
A unified method of upgrading the polarization–optical reflectometric schemes for continuously monitoring the thickness of surface oxide layers is developed on the basis of digital modulation ellipsometry. A phase-modulation attachment for universal automation and computerization of a wide class of reflectometers and hand-operated ellipsometers, is constructed. An automated modulation spectral ellipsometer with a direct digital detection of a signal from a photoreceiver based on the hand-operated Gartner L-119XUV ellipsometer was used in contactlessly monitoring the growth of thin nonuniform layers on the iron surface at an oxygen pressure of 10–4 to 1 mmHg and a low temperature (300°C). The accuracy of the device is 0.05°, and the spectral range is from 0.35 to 0.8 μm. The speed of response is mainly determined by the spectral analyzer, analog–digital transformer, and computer used.
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Kotenev, V.A. Digital Modulation Ellipsometry in Monitoring the Growth of Thermooxide Layers. Protection of Metals 39, 260–268 (2003). https://doi.org/10.1023/A:1023971321596
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DOI: https://doi.org/10.1023/A:1023971321596